Silicon carbide yog ib qho tseem ceeb engineering khoom siv dav hauv kev tsim khoom semiconductor, hnub ci photovoltaic ua, thiab precision siv lead ua kev lag luam. Vim nws zoo heev hardness, hnav tsis kam, thiab thermal stability, ob qho tib sidub silicon carbidethiab ntsuab silicon carbide feem ntau siv hauv kev sib tsoo thiab polishing daim ntaub ntawv.
Txoj kev Polishing tseem ceeb ntawm Silicon Carbide
Tam sim no, cov txheej txheem polishing ntawm silicon carbide feem ntau suav nrog cov tshuab polishing, tshuaj kho tshuab polishing (CMP), electrochemical polishing (ECMP), magnetorheological polishing, catalyst-pab polishing, tribochemical polishing (TCP), thiab plasma-pab polishing (PAP).
Ntawm cov thev naus laus zis no, CMP suav tias yog cov txheej txheem zoo tshaj plaws rau kev ua tiav atomic-theem nto polishing. Nws yog dav siv nyob rau hauv semiconductor processing vim nws muaj peev xwm paub ob qho tib si hauv zos thiab ntiaj teb no planarization tib lub sij hawm. Nyob rau hauv siab -precision polishing, ntsuab silicon carbide feem ntau xaiv vim nws cov kev ua tau zoo txiav thiab ruaj khov polishing nyhuv.
Qhov zoo thiab qhov nyuaj ntawm CMP
Lub polishing efficiency ntawm CMP feem ntau yog nyob ntawm cov tshuaj tiv thaiv tus nqi ntawm cov khoom nto. Kev tshawb fawb qhia tau hais tias kev sib hloov ceev thiab polishing siab muaj qhov cuam tshuam tseem ceeb ntawm polishing tus nqi, thaum kub thiab polishing kua pH tus nqi muaj feem me me.
Ua kom qhov kev sib hloov ceev tuaj yeem txhim kho polishing efficiency. Txawm hais tias siab dua tuaj yeem nce tus nqi tshem tawm, nws kuj tseem tuaj yeem ua rau lub ntsej muag polishing thiab nce nqi ntau lawm. Nyob rau hauv ntau daim ntawv thov kev sib tsoo, dub silicon carbide yog nyiam vim nws hardness zoo thiab tus nqi pheej yig.
Tam sim no, silicon carbide polishing tseem ntsib teeb meem xws li kev tshem tawm cov khoom qis thiab cov nqi ua haujlwm siab. Qee cov thev naus laus zis polishing tshwj xeeb tsuas yog txwv rau kev tshawb fawb hauv chav kuaj vim tias cov khoom siv nyuaj thiab cov txheej txheem ua haujlwm nyuaj.
Kev siv ntawm Silicon Carbide
Silicon carbide tau pom thawj zaug hauv cov meteorites hauv xyoo 1905 thiab tam sim no tsuas yog tsim los ntawm cov khoom siv dag zog. Nws yog dav siv nyob rau hauv cov ntaub ntawv hnub ci photovoltaic, semiconductor ua, quartz siv lead ua, thiab piezoelectric siv lead ua kev lag luam.
Hauv kev lag luam abrasive, dub silicon carbide feem ntau yog siv rau kev sib tsoo thiab kev kho deg, thaum ntsuab silicon carbide yog qhov haum rau precision polishing ntawm cov ntaub ntawv nyuaj thiab nkig. Nrog rau txoj kev loj hlob sai ntawm kev tsim khoom lag luam, qhov kev thov rau silicon carbide polishing tshuab yuav txuas ntxiv mus.
